Femtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.

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dc.contributorUNIVERSIDADE DE SAO PAULO; UNIVERSIDADE FEDERAL DE SAO CARLOS; UNIVERSIDADE DE SAO PAULO; DANIEL SOUZA CORREA, CNPDIA; UNIVERSIDADE DE SAO PAULO.
dc.creatorPAULA. K. T.
dc.creatorFACURE, M. H. M.
dc.creatorANDRADE, M. B.
dc.creatorCORREA, D. S.
dc.creatorMENDONÇA, C. R.
dc.date2026-06-08T20:48:36Z
dc.date2026-06-08T20:48:36Z
dc.date2026-06-08
dc.date2026
dc.date.accessioned2026-07-07T04:30:01Z
dc.descriptionThere is growing interest in usingMXene-basedmaterials for electronic and energy storage applications by integratingadvancedmicrofabricationtechniques. Inthiswork,we investigatethe femtosecondlasermicromachiningofTi3C2Tx MXenefilms toenable thedirect fabricationofmicrosupercapacitor(MSC)electrodeswithhighprecisionandminimal thermal damage.The influenceofpulseenergyandnumberofpulsesontheresultingmicrostructureswas systematicallyanalyzedusing Scanning ElectronMicroscopy, Atomic ForceMicroscopy, EnergyDispersiveX-ray Spectroscopy, andRaman spectroscopy. Irradiationwith lowpulsecounts(1−5pulsesat1010nJ)produced localizedfeatureswithdepthsof 0.5−1.0μmandminimal redeposition,whereashigherpulsenumbers(upto20,000)yieldedfeaturesof∼1.2μmwithpartialmaterialremovalandresolidified regions.Incubationanalysisrevealedaprogressivereductioninablationthresholdwithincreasingpulsenumber.Elementalmapping andRamanspectraconfirmedefficientmaterial removal andexposureof theunderlyingsubstrate.Usingoptimizedparameters, interdigitatedelectrodeswerefabricatedandintegratedintoplanarMSCs,whichexhibitedanarealcapacitanceof19mF/cm2at5 mV/s, aswell as energy andpower densities of 0.45μWh/cm2 and0.3mW/cm2 at 1mA/cm2, respectively. These results demonstratethatfemtosecondlaserprocessingprovidesaversatileandhigh-resolutionapproachforMXenepatterning,withstrong potential forscalablemicrodevicefabricationinenergy-relatedtechnologies.
dc.format5384−5395
dc.identifierACS Omega, v. 11, 2026.
dc.identifierhttp://www.alice.cnptia.embrapa.br/alice/handle/doc/1187387
dc.identifierhttps://doi.org/10.1021/acsomega.5c08652
dc.identifier.urihttp://hdl.handle.net/123456789/463275
dc.languageeng
dc.rightsopenAccess
dc.subjectIcrosupercapacitors (MSCs) Systematic variationof pulse e
dc.subjectOn-chipenergystoragedevices
dc.titleFemtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.
dc.typeArtigo de periódico

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