Femtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.
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There is growing interest in usingMXene-basedmaterials for electronic and energy storage applications by integratingadvancedmicrofabricationtechniques. Inthiswork,we investigatethe femtosecondlasermicromachiningofTi3C2Tx MXenefilms toenable thedirect fabricationofmicrosupercapacitor(MSC)electrodeswithhighprecisionandminimal thermal damage.The influenceofpulseenergyandnumberofpulsesontheresultingmicrostructureswas systematicallyanalyzedusing Scanning ElectronMicroscopy, Atomic ForceMicroscopy, EnergyDispersiveX-ray Spectroscopy, andRaman spectroscopy. Irradiationwith lowpulsecounts(1−5pulsesat1010nJ)produced localizedfeatureswithdepthsof 0.5−1.0μmandminimal redeposition,whereashigherpulsenumbers(upto20,000)yieldedfeaturesof∼1.2μmwithpartialmaterialremovalandresolidified regions.Incubationanalysisrevealedaprogressivereductioninablationthresholdwithincreasingpulsenumber.Elementalmapping andRamanspectraconfirmedefficientmaterial removal andexposureof theunderlyingsubstrate.Usingoptimizedparameters, interdigitatedelectrodeswerefabricatedandintegratedintoplanarMSCs,whichexhibitedanarealcapacitanceof19mF/cm2at5 mV/s, aswell as energy andpower densities of 0.45μWh/cm2 and0.3mW/cm2 at 1mA/cm2, respectively. These results demonstratethatfemtosecondlaserprocessingprovidesaversatileandhigh-resolutionapproachforMXenepatterning,withstrong potential forscalablemicrodevicefabricationinenergy-relatedtechnologies.
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Icrosupercapacitors (MSCs) Systematic variationof pulse e, On-chipenergystoragedevices